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▼ [5p-C11-6] Low-temperature Oxidation Characteristics of Si using SrTixMg1-xO3-δ Catalyst
Keywords:catalyst, oxidation
Following our successful results on low temperature oxidation of 4H-SiC, this work investigates oxidation characteristic of catalytic thermal oxidation using the perovskite oxide, SrTixMg1-xO3-δ, as catalyst. Si is used as oxidation target and is set beside the catalyst in a furnace tube. Enhanced oxidation is clearly observed in the temperature range 650-850oC. The diffusion length of oxygen atoms generated by the catalyst is found to be tens of mm.