4:00 PM - 4:15 PM
[5p-C11-9] Theoretical study on interface orientation dependence of Si thermal oxidation based on Si emission model
Keywords:Silicone, First-principles calculation
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)
Masao Inoue(Renesas), Takanobu Watanabe(Waseda Univ.)
4:00 PM - 4:15 PM
Keywords:Silicone, First-principles calculation