The 78th JSAP Autumn Meeting, 2017

Takuya Nagura

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.3 Insulator technology

[5p-C11-1~10] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

4:00 PM - 4:15 PM

[5p-C11-9] Theoretical study on interface orientation dependence of Si thermal oxidation based on Si emission model

〇Takuya Nagura1, Shingo Kawachi1, Kenta Chokawa1, Hiroki Shirakawa1, Masaaki Araidai1,2,6, Hiroyuki Kageshima3,6, Tetsuo Endoh4,5,6, Kenji Shiraishi1,2,6 (1.Graduate School of Engineering, Nagoya Univ., 2.IMaSS, Nagoya Univ., 3.Interdisciplinary Graduate School of Science and Engineering, Shimane Univ., 4.Graduate School of Engineering, Tohoku Univ., 5.CIES, Tohoku Univ., 6.JST-ACCEL)