[5p-C22-1~9] 1.6 Ultrasonics

△ [5p-C22-9] Evaluation of silicon nitride surface defect using photoacoustic imaging

〇(M1)Daisuke Endo¹, Akisato Yamamoto¹, Junichi Tatami², Eiji Takahashi¹, Yoshihisa Yamaoka¹ (1.Saga Univ., 2.Yokohama National Univ.)

Keywords:photoacoustic imaging, ceramics, defect evaluation

In this research, we investigated whether micro surface defects of silicon nitride can be evaluated by photoacoustic imaging, which has attracted attention as a method of observing the deep part of the living body with high contrast. In order to verify the principle this time,we evaluated plastic with simple surface defects and polished silicon nitride with a small impression on the surface by photoacoustic imaging.