[5p-PA2-1~29] 12.1 Fabrications and Structure Controls

[5p-PA2-9] Influence of polar interactions between substrate and molecules on the initial stage of thin-film formation

〇Daisuke Hanyu¹, Haruki Takeda¹, Ryosuke Matsubara¹, Atsushi Kubono¹ (1.Shizuoka Univ.)

Keywords:vapor deposition, SAM