[5p-PB1-1~13] 3.13 Semiconductor optical devices

[5p-PB1-12] Research on Integration Technology of Waveguides and Photodetectors on Si Substrate

〇Taichi Uruma¹, Yoshiteru Amemiya¹, Shin Yokoyama¹ (1.Res. Int. for Nanodevice and Bio Systems, Hiroshima Univ.)

Keywords:semiconductor, silicon photonics, photodetector