[5p-PB3-1~26] 16.3 Bulk, thin-film and other silicon-based solar cells

[5p-PB3-14] Preparation of anti-reflection films by mist coat method onto the textured Si surfaces

Taku Osakabe¹, Takuto Yasuda¹, Takafumi Sugano¹, Takahiro Himuro¹, 〇Yoji Saito¹ (1.Seikei Univ.)

Keywords:sol-gel, anti-reflection film, texturing

We tried to form anti-reflection films made of ZnO onto textured silicon surfaces by a mist coating method.