[5p-PB3-1~26] 16.3 Bulk, thin-film and other silicon-based solar cells

[5p-PB3-15] ZnO anti-reflection coating by spin coating method onto textured single crystalline silicon substrates

Sohei kondo¹, Takahiro Himuro¹, 〇Yoji Saito¹ (1.Seikei Univ.)

Keywords:anti-reflection film, spin coating, texturing

We try to form anti-reflection films onto textured silicon substrates by spin coating method. In the previous work, we formed TiO2 films, but the films often have cracks. In this study, we can prepare ZnO films without cracks.