[5p-PB3-1~26] 16.3 Bulk, thin-film and other silicon-based solar cells

[5p-PB3-9] Passivation and resistance evaluation of p-μc-SiO_x:H/oxide layer stacked structures

〇Kazuyoshi Nakada¹ (1.Tokyo Inst. Tech.)

Keywords:crystalline silicon, solar cell, microcrystalline silicon

To realize a low defective and low resistance contact structure in crytalline silicon solar cells, we applied microcrystalline silicon oxide in the doped layer. By using this material, we achieved both low resistance and high effective lifetime.