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[5p-PB7-6] Improvement of estimation method of liquid properties using SAW sensor responses and inverse problem method
Keywords:surface acoustic wave
Liquid-phase sensor is realized using a shear horizontal surface acoustic wave (SH-SAW) sensor. Sensor responses are normally evaluated with a numerical calculation method and perturbation theory. As the velocity shift and attenuation change of the SH-SAW are derived from the perturbation theory, estimation of the liquid properties are possible. However, the perturbation theory is one of the approximate method. The estimated results are not agree with literature values. Therefore, it is important to develop the estimation method of liquid properties. In this paper, we adapted the inverse problem method for it.