The 78th JSAP Autumn Meeting, 2017

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Tadahiro Kawasaki(JFCC), Nobuhiro Ishikawa(NIMS), Shigekazu Nagai(Mie Univ.)

4:15 PM - 4:30 PM

△ [5p-S41-11] Development of Field Emitter Array on a Transparent Substrate for Optical Control

〇Toya Kera1, Kentaro Iwami1, Norihiro Umeda1 (1.Tokyo Univ. of Agriculture and Technology)

Keywords:Field Emitter Array, electron beam

A field emitter array (FEA) for optical emission control was fabricated on a transparent substrate. An array consisting of about 30000 emitters is arranged in a 3-mm diameter area on a quartz-glass substrate, and has three main components: emitter electrode, gate electrode, and insulation film. I–V characteristics were measured and electron emission regime was confirmed as field emission from Fowler-Nordheim analysis.