The 78th JSAP Autumn Meeting, 2017

Presentation information

Print

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Tadahiro Kawasaki(JFCC), Nobuhiro Ishikawa(NIMS), Shigekazu Nagai(Mie Univ.)

4:30 PM - 4:45 PM

[5p-S41-12] Uniformity of magnification in electrostatic divergent lens with short focal length

〇(M1)Saba Maeda1, Hiroshi Tsuji1, Yasuhito Gotoh1 (1.Kyoto Univ.)

Keywords:electrostatic lens, short focal length