The 78th JSAP Autumn Meeting, 2017

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Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Tadahiro Kawasaki(JFCC), Nobuhiro Ishikawa(NIMS), Shigekazu Nagai(Mie Univ.)

5:15 PM - 5:30 PM

[5p-S41-15] Self-sensing cantilever using electron-beam-deposited Pt

〇Kenta Kashida1, Fujio Wakaya1, Hayato Yamashita1,2, Yuji Miyato1, Satoshi Abo1, Masayuki Abe1 (1.Osaka Univ., 2.JST PRESTO)

Keywords:electron-beam-deposited Pt, self-sensing cantilever