Kenta Kashida

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Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

5:15 PM - 5:30 PM

[5p-S41-15] Self-sensing cantilever using electron-beam-deposited Pt

〇Kenta Kashida¹, Fujio Wakaya¹, Hayato Yamashita^1,2, Yuji Miyato¹, Satoshi Abo¹, Masayuki Abe¹ (1.Osaka Univ., 2.JST PRESTO)