The 78th JSAP Autumn Meeting, 2017

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7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

[5p-S41-1~20] 7.2 Applications and technologies of electron beams

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

Tadahiro Kawasaki(JFCC), Nobuhiro Ishikawa(NIMS), Shigekazu Nagai(Mie Univ.)

6:00 PM - 6:15 PM

[5p-S41-18] Influence of oxygen on metal boride thermionic cathode

〇Takaya Kobayashi1, Tomoya Yokoyama1, Hidekazu Murata1, Eiji Rokuta1, Hiroshi Shimoyama1, Hiroshi Yasuda2 (1.Meijo Univ., 2.PARAM Corp.)

Keywords:electron beam lithography, thermionic electron gun, oxygen introduction