Measurement of emission current from individual working emitter in volcano-structured Spindt-type field emitter arrays using evaluation instrument for multi-emitters

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.2 Applications and technologies of electron beams

Tue. Sep 5, 2017 1:15 PM - 6:45 PM S41 (Conf. Room 1)

6:15 PM - 6:30 PM

〇Kodai Taguchi¹, HIdekazu Murata¹, Eiji Rokuta¹, Hiroshi Shimoyama¹, Masayoshi Nagao², Katsuhisa Murakami² (1.Meijo Univ., 2.AIST)

Keywords:Field Emitter Arrays, Evaluation instrument for multi-emitters, PEEM;photo emission electron microscopy