[5p-S44-1~10] 【CS.9】7.1 & 7.4 Code-sharing session

[5p-S44-9] Pt atomic layer deposition for silicon X-ray micropore optics

〇Kazuma Takeuchi¹, Ezoe Yuichiro¹, Ishikawa Kumi², Numazawa Masaki¹, Terada Masaru¹, Ishi Daiki¹, Fujitani Maiko¹, Itoyama Takahito¹, Otsubo Ryota¹, Fukushima Aoto¹, Sowa Mark J.³, Ohashi Takaya¹, Mitsuda Kazuhisa² (1.TMU, 2.ISAS/JAXA, 3.Ultratech)

Keywords:X-ray optics, atomic layer deposition, micropore optics