[6a-A301-1~11] 15.4 III-V-group nitride crystals

△ [6a-A301-11] Preparation of high-quality a-plane AlN on r-plane sapphire using sputtering method

〇Ryo Fukuta¹, Yamaki Yuta¹, Hayashi Yusuke^1,2, Miyake Hideto^1,2, Hiramatsu Kazumasa¹ (1.Mie Univ Grad.School of Engineering, 2.Mie Univ Grad. School of Regional Innovation Studies)

Keywords:AlN, Sputtering method, Annealing