The 78th JSAP Autumn Meeting, 2017

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.7 Crystal evaluation, impurities and crystal defects

[6a-A503-1~13] 15.7 Crystal evaluation, impurities and crystal defects

Wed. Sep 6, 2017 9:00 AM - 12:30 PM A503 (503)

Yuta Nagai(GlobalWafers Japan), Shotaro Takeuchi(Ohsaka Univ.)

10:45 AM - 11:00 AM

[6a-A503-7] A study on generation and annihilation of point defects during silicon crystals from melt (1): Relation between pulling rate and thermal gradient

〇Takao Abe1, Toru Takahasi1, Koun Shirai2 (1.ShinEtsu Handoutai, 2.ISIR Osaka Univ.)

Keywords:point defects