[6a-C16-1~9] 17.3 層状物質

▼ [6a-C16-3] Growth of uniform hexagonal boron nitride film using chemical vapor deposition

Alice Dearle¹、〇SHENGNAN WANG¹、Hiroki Hibino^2,1、Kazuhide Kumakura¹ (1.NTT Basic Research Labs.、2.Kwansei Gakuin Univ.)

キーワード：CVD, h-BN