[6a-C22-1~11] 22.1 Joint Session M "Phonon Engineering"

[6a-C22-9] Influence of Ti-dopant on thermal conductivity of diamond-like carbon films

〇Takahiro Suzuki¹, Yuichiro Yamashita^1,2, Takashi Yagi^1,2, Naoyuki Taketoshi^1,2, Jia Junjun¹, Yuzo Shigesato¹ (1.AoGaku Univ., 2.AIST)

Keywords:Diamond-like carbon, Thermal conductivity, Thin film