[6a-C24-1~9] 6.6 Probe Microscopy

△ [6a-C24-8] Drift correction in scanning probe microscopy

〇Ryosuke Kizu¹, Ichiko Misumi¹, Akiko Hirai¹, Satoshi Gonda¹ (1.AIST)

Keywords:SPM, AFM, drift correction

Fluctuation of relative position between a sample and a tip distorts a scanning probe microscopy image, that is called thermal drift. This report proposes a method of thermal drift correction for a three-dimensional measurement of a sillicon line pattern measured by atomic force microscopy (AFM). A time-dependent drift of several-nanometers in AFM image was corrected precisely by this method.