[6p-A301-8~14] 15.4 III-V-group nitride crystals

△ [6p-A301-8] In-depth microstrucutral analysis of an AlN thick film grown on a trench-patterned template using nanobeam X-ray diffraction

〇Kazuki Shida¹, Shotaro Takeuchi¹, Hideto Miyake^2,3, Kazumasa Hiramatsu³, Kazushi Sumitani⁴, Yasuhiko Imai⁴, Shigeru Kimura⁴, Akira Sakai¹ (1.Grad. Sch. of Eng. Sci., Osaka Univ., 2.Grad. Sch. of Region. Innov., Mie Univ., 3.Grad. Sch. of Eng., Mie Univ., 4.JASRI)

Keywords:nanobeam X-ray diffraction