[6p-A413-1~18] 12.1 Fabrications and Structure Controls

△ [6p-A413-6] Novel Thin Film Deposition Method using Microwave Excited Atmospheric Pressure Plasma Jet

〇Ryosuke Yamada¹, Tsunehisa Ono¹, Tatsuo Ishijima², Yasunori Tanaka¹, Yoshihiko Uesugi¹, Makoto Karakawa^2,3, Takayuki Kuwabara^1,2, Kohshin Takahashi^1,2, Tetsuya Taima^2,3 (1.Kanazawa Univ., 2.RSET, 3.InFiniti)

Keywords:new film formation method