The 78th JSAP Autumn Meeting, 2017

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Oral presentation

7 Beam Technology and Nanofabrication » 7.5 Ion beams

[6p-S41-1~10] 7.5 Ion beams

Wed. Sep 6, 2017 1:30 PM - 4:15 PM S41 (Conf. Room 1)

Satoshi Abo(Osaka Univ.), Toshio Seki(Kyoto Univ.)

1:45 PM - 2:00 PM

[6p-S41-2] Measurement of charge distribution in Si generated by high energy ion

〇Kenichi Tani1,2, Satoshi Abo1,2, Fujio Wakaya1, Shinobu Onoda2, Hayato Yamashita1,3, Yuji Miyato1, Masayuki Abe1 (1.Osaka Univ., 2.QST, 3.JST PRESTO)

Keywords:charge distribution, high energy ion