The 78th JSAP Autumn Meeting, 2017

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[6p-S41-1~10] 7.5 Ion beams

Wed. Sep 6, 2017 1:30 PM - 4:15 PM S41 (Conf. Room 1)

Satoshi Abo(Osaka Univ.), Toshio Seki(Kyoto Univ.)

3:45 PM - 4:00 PM

[6p-S41-9] Improvement of Secondary Ion Detection Sensitivity by Adding Sodium to PEG Surface

〇Taiki Matsuda1, Toshio Seki2, Takaaki Aoki3, Jiro Matsuo2 (1.Kyoto Univ., 2.Graduate School of Engineering, Kyoto Univ., 3.ACCMS, Kyoto Univ.)

Keywords:SIMS, matrix, PEG