5:45 PM - 6:00 PM
[6p-S43-17] Properties and analysis of superconducting resonators made of sputtered Al thin film
Keywords:superconductor, resonator, microwave
Resonance properties of superconducting resonators made of a sputtered Al thin filn were mesured in detail and analyzed. It is found that at temperatures below Tc/6 the quality factor decreses monotonically with decreasing temperature due to the Kondo effect-like temperature dependence of the residual resistance. It is also shown that at temperatures below Tc/6 the kinetic inductance of quasiparticles seriously contributes to the change of resonance frequency with decreasing temperature.