Fabrication and evaluation of tapered superconducting TSV for STJ detector using 3D integration technique

Presentation information

Oral presentation

11 Superconductivity » 11.4 Analog applications and their related technologies

Wed. Sep 6, 2017 1:15 PM - 7:15 PM S43 (Conf. Room 3)

Toshihiko Kiwa(Okayama Univ.), Shigehito Miki(NICT), Tohru Taino(Saitama Univ.), Saburo Tanaka(Toyohashi Univ. Tech.)

6:15 PM - 6:30 PM

〇Kazusa Monzen¹, Soki Hatakeyama¹, Masato Naruse¹, Hiroaki Myoren¹, Masahiro Aoyagi², Tohru Taino¹ (1.Saitama Univ., 2.AIST)

Keywords:superconducting tunnel junction detector