The 78th JSAP Autumn Meeting, 2017

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Oral presentation

11 Superconductivity » 11.4 Analog applications and their related technologies

[6p-S43-1~21] 11.4 Analog applications and their related technologies

Wed. Sep 6, 2017 1:15 PM - 7:15 PM S43 (Conf. Room 3)

Toshihiko Kiwa(Okayama Univ.), Shigehito Miki(NICT), Tohru Taino(Saitama Univ.), Saburo Tanaka(Toyohashi Univ. Tech.)

3:00 PM - 3:15 PM

[6p-S43-7] Stable Production of SmBCO Films by Off-axis Sputtering Method

〇Seiji Adachi1, Keiichi Tanabe1 (1.SUSTERA)

Keywords:high-Tc superconductor, thin film, sputtering deposition

We report about stable deposition of SmBCO thin film by off-axis sputtering method. A SmBCO sintered compact target having a stoichiometric composition was used to form a film by DC discharge. When the same target is used for a long time, it is necessary to constantly change the film forming conditions according to surface wear. We found that high quality thin films can be continuously produced by increasing the substrate height and gradually moving the target under the substrate as the use time becomes longer.