Synthesis process of nano-crystals on Si substrates in etching of CF<sub>4</sub>/Ar plasmas

Presentation information

Oral presentation

8 Plasma Electronics » 8.4 Plasma etching

Thu. Sep 7, 2017 9:00 AM - 11:45 AM A402 (402+403)

11:15 AM - 11:30 AM

〇(M2)Gento Kuroda¹, Kazuo Takahashi¹, Koji Nishio¹ (1.Kyoto Inst. of Tech)

Keywords:Etching, Transmission Electron Microscope, Nano-crystals