The 78th JSAP Autumn Meeting, 2017

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Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

[7a-A413-1~9] 8.1 Plasma production and control

Thu. Sep 7, 2017 9:00 AM - 11:30 AM A413 (413)

Akimitsu Hatta(Kochi Univ. of Tech.)

11:15 AM - 11:30 AM

△ [7a-A413-9] Relationship between density of molecular nitrogen in the metastable A3Σu+ state and temperature of discharge tube in a remote nitrogen plasma source

〇masaharu shimabayashi1, Kazuaki Kurihara2, Koichi Sasaki1 (1.Hokkaido Univ., 2.Toshiba/Imec)

Keywords:SiC, nitriding