11:30 AM - 11:45 AM
[7a-C21-10] High Speed Crystallization of Amorphous Silicon Films on Flexible Glass Substrate by Atmospheric Pressure Thermal-Plasma-Jet Irradiation Using Cylindrical Rotation Stage
Keywords:Thermal-Plasma-Jet
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)
Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)