[7a-PA5-1~22] 3.8 Optical measurement, instrumentation, and sensor

[7a-PA5-19] Development of Ultrawide-Dynamic-Range Spectrophotometer

〇Masashi Kuwahara¹, Takashi Fukuda¹, Toshio Fukaya¹, Masahiro Mori¹, Kazuki Shibata², Takahiro Ichimiya², Hironobu Kawabata², Takashi Amano², Toshiyasu Tadokoro³, Tomonori Enyo⁴, Hiroto Ito⁴, Masaaki Miyake⁴, Takanori Wada⁴ (1.AIST, 2.Bunkoukeiki, 3.Techno Synergy, 4.OCJ)

Keywords:spectrophotometer, optical density

A highly sensitive spectrophotometer was strongly requested to enable to measure optical filters with over optical density (OD) = 10. We have developed the spectrophotomete with high sensitivity of OD=12. The light from Xenon lamp was made monochromatic by the first spectrometer, and the monochromatic light was incident to a sample, after that, the light was guided to the photon detector through the second monochrometer. A rock-in and a photon counting detection were setup on the spectrophotometer as light detectors. It was found that OD=9 by the rock-in and OD=12 by the photoncounting were achieved, respectively.