[7a-PA6-1~14] 6.1 Ferroelectric thin films

[7a-PA6-8] Modification Effects of Lead-free Ferroelectric Thick-Films by Proton Beam Irradiation

Jun Hirade¹, 〇Masaki Yamaguchi^1,2, Yoichiro Masuda³ (1.Shibaura Inst. of Tech., 2.Shibaura Inst. of Tech. RCGI, 3.Hachinohe Inst. of Tech.)

Keywords:ferroelectrics, proton beam

The proton beam irradiation is suitable for realization with the highly aspect ratios pattern formation of ferroelectric thick films. The degradation of crystallinity and the improvement of leakage current properties are confirmed by proton beam irradiation. In this study, we discuss the effects of thick film properties by the proton beam irradiation.