The 78th JSAP Autumn Meeting, 2017

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Oral presentation

CS Code-sharing session » 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

[7p-A204-1~14] 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

Thu. Sep 7, 2017 1:15 PM - 5:00 PM A204 (204)

Hiroyuki Ota(AIST), Hironori Fujisawa(Univ. of Hyogo)

1:45 PM - 2:00 PM

[7p-A204-3] Fabrication of ferroelectric HfO2-based thin films by solid state epitaxy method

〇Takahisa Shiraishi1, Sujin Choi1, Takao Shimizu2, Hiroshi Funakubo2, Takanori Kiguchi1, Toyohiko J. Konno1 (1.Tohoku Univ., 2.Tokyo Tech.)

Keywords:HfO2, ferroelectricity, epitaxial thin films