3:15 PM - 3:30 PM
[7p-A204-8] Fabrication of ferroelectric HfxZr1-xO2/Si hetero structure by using dual-target magnetron sputtering system
Keywords:HfO2, Ferroelectrics
Oral presentation
CS Code-sharing session » 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session
Thu. Sep 7, 2017 1:15 PM - 5:00 PM A204 (204)
Hiroyuki Ota(AIST), Hironori Fujisawa(Univ. of Hyogo)
3:15 PM - 3:30 PM
Keywords:HfO2, Ferroelectrics