Kenshi Takada

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:15 PM - 5:00 PM A204 (204)

Oral presentation
| CS Code-sharing session
| 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

[7p-A204-1~14] 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

3:15 PM - 3:30 PM

[7p-A204-8] Fabrication of ferroelectric Hf_xZr_1-xO₂/Si hetero structure by using dual-target magnetron sputtering system

〇Kenshi Takada¹, Daiki Kamada¹, Ryosuke Kanaya¹, Daisuke Kiriya¹, Takeshi Yoshimura¹, Norifumi Fujimura¹ (1.Osaka Pref. Univ.)