The 78th JSAP Autumn Meeting, 2017

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Oral presentation

CS Code-sharing session » 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

[7p-A204-1~14] 【CS.7】6.1 & 13.3 & 13.5 Code-sharing session

Thu. Sep 7, 2017 1:15 PM - 5:00 PM A204 (204)

Hiroyuki Ota(AIST), Hironori Fujisawa(Univ. of Hyogo)

3:15 PM - 3:30 PM

[7p-A204-8] Fabrication of ferroelectric HfxZr1-xO2/Si hetero structure by using dual-target magnetron sputtering system

〇Kenshi Takada1, Daiki Kamada1, Ryosuke Kanaya1, Daisuke Kiriya1, Takeshi Yoshimura1, Norifumi Fujimura1 (1.Osaka Pref. Univ.)

Keywords:HfO2, Ferroelectrics