[7p-A409-6~11] 【CS.3】3.9 & 4.7 Code-sharing session

▲ [7p-A409-7] GaAsP microelectromechanical beam structures for terahertz bolometer applications

〇(M1)Boqi Qiu¹, Ya Zhang¹, Suguru Hosono¹, Koichi Akahane², Naomi Nagai¹, Kazuhiko Hirakawa¹ (1.IIS, Univ. of Tokyo, 2.NICT)

Keywords:terahertz detector, MEMS

We reported a room temperature, all electrical driving and detecting, very sensitive thermometer using a GaAs doubly clamped microelectromechanical (MEMS) beam resonator for bolometer applications. In this work, we used GaAsP to induce a preloaded tensile strain in the MEMS beam and investigated how the tensile strain influence the behavior.