[7p-A411-1~17] 1.5 Instrumentation, measurement and Metrology

▲ [7p-A411-8] Quartz Double-Ended Tuning Fork Oscillators with Surface Electrodes

〇(M1)YuehCheng Tsai¹, Li-Syuan Fu¹, Mao-Cheng Weng¹, Guo-En Chang¹ (1.Nat. Chung Cheng Univ.)

Keywords:Quartz, Tuning Fork

Quartz Double-end Turning Fork (DETF) structures have long been considered promising for oscillators due to the good mechanical quality factor, temperature stability, and excellent durability [1]. However, the fabrication of quartz DETFs requires patterning electrodes to surround the cross-section of the beams; such fabrication relies on very complex fabrication techniques so that the yield is very low. Alternatively, it has been proposed that the configurations of partial surface electrodes can also be used for successfully driving quartz DETFs [2, 3]. In this paper, we present preliminary results on the fabrication and characterization of quartz DETF oscillators with surface electrodes.