[7p-A412-1~12] 6.2 Carbon-based thin films

[7p-A412-10] Formation of diamond-like carbon film using high power impulse magnetron sputtering

〇Atsushi Ishikawa¹, Kazunori Iga¹, Takayuki Ohta¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba inst tech., 3.Gifu Univ.)

Keywords:diamond-like carbon film, High power impulse magnetron sputtering

A diamond-like carbon (DLC) film has been attracted attention as a surface coating material due to some good properties such as high hardness, low friction, high wear resistance and so on. High power impulse magnetron sputtering (HiPIMS) that a high peak power density with a short pulse applys to the electrodes realizes a smooth surface, good adhesion and a very dense film due to high ionization rate of the target particles. In this study, DLC films was deposited by using HiPIMS.