Simulation of Non-Equilibrium Atmospheric Pressure He/H<sub>2</sub>/CH<sub>4</sub> Plasmas for Carbon Thin Films Deposition

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and control

Thu. Sep 7, 2017 4:00 PM - 6:30 PM A413 (413)

4:15 PM - 4:30 PM

〇(M2)Kazuma Ohki¹, Akinori Oda¹, Takayuki Ohta², Hiroyuki Kousaka³ (1.Chiba inst. Technol., 2.Meijo Univ., 3.Gifu Univ.)

Keywords:Non-Equilibrium Atmospheric Pressure Plasmas, Carbon Thin Films