[7p-C13-1~9] Recent GFIS /advanced ion source microscopy technologies and its future prospects for R & D of materials and devices

▲ [7p-C13-5] Nanopore Fabrication to Two Dimensional Crystals by Adjusting Dose and focus of Helium Ion Microscope

〇Kentaro Kawai¹, Takumi Hayashi¹, Kenta Arima¹, Osamu Tabata² (1.Osaka University, 2.Kyoto Univesity)

Keywords:Nanopore

Single-molecule detection using nanopore have been developed in the past decade. The principle of detection among major nanopore sensors is detecting characteristic change of ionic current when a molecule passes through. DNA sequencing is one of the promising applications for nanopore sensing device. The sensitivity of DNA nanopore sequencer is rely on the diameter and thickness of the nanopore. To make precose size of nanopore on two dimensional crystals, ion milling by Helium ion microscope was applied with controlling the dose amount and focus distance.