[7p-C19-1~10] Challenges for 'multi-scale' processing - dry, wet, or else?...

[7p-C19-6] Semiconductor processes using multi-scale supercritical media

〇Eiichi Kondoh¹ (1.Univ. Yamanashi)

Keywords:supercritical fluid

Supercritical fluids are compressive and high-density media that have a good penetration and transportation capability. Such superior properties are ideal for processing features having a wide range of dimensions from nanometer scale to micrometer scale. In silicon processing, application of supercritical fluids to drying, cleaning, deposition, and etching has been proposed. In this talk, characteristics of supercritical fluids are overviewed in terms of semiconductor process applications.