[7p-PA2-1~14] 3.15 Silicon photonics

[7p-PA2-11] Fabrication and evaluation of waveguide structure of Si/CaF₂ quantum cascade lasers

〇Hiroki Kondo¹, Yusuke Saito¹, Masahiro Watanabe¹ (1.Tokyo Tech.)

Keywords:waveguide, semiconductor process, waveguide loss