[7p-PA3-1~8] 8.1 Plasma production and control

[7p-PA3-1] Development of a desktop-sized electron cyclotron resonance ion source

〇Tatsuei Yamazaki¹, Yodel Okazaki¹, Hiroya Uyama¹, Toyohisa Asaji¹, Takeshi Hitobo² (1.NIT, Toyama Coll., 2.Tateyama Machine Co.)

Keywords:ECR ion source, ECR plasma