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Poster presentation

8 Plasma Electronics » 8.1 Plasma production and control

[7p-PA3-1~8] 8.1 Plasma production and control

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PA3 (P)

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1:30 PM - 3:30 PM

[7p-PA3-1] Development of a desktop-sized electron cyclotron resonance ion source

〇Tatsuei Yamazaki¹, Yodel Okazaki¹, Hiroya Uyama¹, Toyohisa Asaji¹, Takeshi Hitobo² (1.NIT, Toyama Coll., 2.Tateyama Machine Co.)

1:30 PM - 3:30 PM

[7p-PA3-2] Design of rotary-typed magnetron sputtering device for effective utilization of thin film material target

〇Yutarou Nakamura¹, Yasunori Ohtsu¹ (1.Saga Univ.)

1:30 PM - 3:30 PM

[7p-PA3-3] Development of RF magnetized hollow discharge electrode for low-pressure high-density plasma production

〇Kazuki Aso¹, Yasunori Ohtsu¹ (1.Saga Univ.)

1:30 PM - 3:30 PM

[7p-PA3-4] Influence of Xenon Argon Mixing Ratio on Generating Conditions of Laser Sustained Plasma

〇Makoto Matsui¹, Takahiro Ono¹, Tomoki Kamei¹ (1.Shizuoka Univ.)

1:30 PM - 3:30 PM

△ [7p-PA3-5] Memory Effect on Extraction of an Aluminum-Nitride Ion Beam from a Magnetron Sputter type Ion Source

〇Kentaro Yoshioka¹, Takahiro Kenmotsu², Motoi Wada¹ (1.Sci. Eng. , Doshisha Univ., 2.Med. Sci. , Doshisha Univ.)

1:30 PM - 3:30 PM

△ [7p-PA3-6] Simulation of Inductively-Coupled-Plasma Ignition with Capacitive Coupling

〇(M2)Makato Moriyama¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)

1:30 PM - 3:30 PM

[7p-PA3-7] Development of a Duoplasmatron Type Plasma Cathode for Sheet Plasma Production

〇Ryo Emura¹, Mamiko Sasao², Beverly Suarez¹, Motoi Wada¹ (1.Doshisha Univ., 2.Office of R&D promotion Doshisha Univ.)

1:30 PM - 3:30 PM

▲ [7p-PA3-8] Ignition Characteristics of Atmospheric 13.56 MHz RF Inductively Coupled Plasma

〇(D)JoeyKim Tumbali Soriano¹, Motoi Wada¹ (1.Graduate School of Sci. and Eng., Doshisha Univ.)

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