Makato Moriyama

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Speaker, Author, Co-Author

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PA3 (P)

Poster presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[7p-PA3-1~8] 8.1 Plasma production and control

1:30 PM - 3:30 PM

△ [7p-PA3-6] Simulation of Inductively-Coupled-Plasma Ignition with Capacitive Coupling

〇(M2)Makato Moriyama¹, Ivan Ganachev^1,2, Keiji Nakamura¹ (1.Chubu Univ., 2.Shibaura Mechatronics)