The 78th JSAP Autumn Meeting, 2017

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Poster presentation

8 Plasma Electronics » 8.1 Plasma production and control

[7p-PA3-1~8] 8.1 Plasma production and control

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PA3 (P)

1:30 PM - 3:30 PM

△ [7p-PA3-6] Simulation of Inductively-Coupled-Plasma Ignition with Capacitive Coupling

〇(M2)Makato Moriyama1, Ivan Ganachev1,2, Keiji Nakamura1 (1.Chubu Univ., 2.Shibaura Mechatronics)

Keywords:Inductively coupled plasma, Capacitively coupled plasma, Plasma ignition