The 78th JSAP Autumn Meeting, 2017

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Poster presentation

8 Plasma Electronics » 8.1 Plasma production and control

[7p-PA3-1~8] 8.1 Plasma production and control

Thu. Sep 7, 2017 1:30 PM - 3:30 PM PA3 (P)

1:30 PM - 3:30 PM

[7p-PA3-3] Development of RF magnetized hollow discharge electrode for low-pressure high-density plasma production

〇Kazuki Aso1, Yasunori Ohtsu1 (1.Saga Univ.)

Keywords:Plasma